In addition to the instruments in the Taniguchi Laboratory, equipment owned by the following organizations is also available.
- Nanofabrication Platform
- Molecule and Material Synthesis Platform
- Nanotechnology Advanced Instrumentation Facility, ISIR
- Shared Equipment at ISIR
Instruments
Double-Sided Mask Aligner
Union PEM-800
Fabrication of electrical wiring, microfluidic channels, etc.
ECR Sputtering System
ELIONIX EIS-220T
Pore fabrication, microfluidic channel fabrication, electrode fabrication
Dicing Saw
disco DAD322
Used for wafer dicing
CVD
SAMCO PD-200STP-NP
SiO2 deposition, etc.
UV Cleaner
SAMCO UV-1
Substrate cleaning and resist removal
Optical Microscope
OLYMPUS BX-61
Sample observation
Tabletop Electron Microscope
HITACHI TM3030
Observation of surface and cross-sectional morphologies
Improving resist etch resistance
Spin Coater
MIKASA MS-A150
Coating of resists and imide materials
Coating of surface treatment agents, etc.
FT-IR
ThermoFisher Nicolet iS-50
Component analysis of organic materials
Film Thickness Meter
Filmetrics F20-UV
Thickness measurement of SiO2, Al2O3, SiN, and resists
Electron Beam Lithography System
JEOL JSM-7001
Fabrication of electrical wiring, microfluidic channels, etc.
Scanning Electron Microscope
HITACHI S-4300
Observation of surface and cross-sectional morphologies
Optical Microscope
OLYMPUS BX-51
Sample observation
Digital Microscope
HIROX KH-8700
Checking liquid injection in PDMS microchannels; low-magnification sample observation
Spin Coater
MIKASA MS-A100
Coating of resists, imide materials, and surface treatment agents, etc.
Plasma Cleaner
FEMTO
PDMS bonding; hydrophilization of SiO2 surfaces, etc.